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SILICON MICROSTRUCTURES INCORPORATED
* Small, Low Cost OEM Pressure Die
SM5106
Low Cost OEM Pressure Die
DESCRIPTION
The SM5106 is a very small (1.56mm x 1.56mm) silicon micromachined piezoresistive pressure sensing chip that has been optimized to provide the highest possible accuracy for a die of this size. This performance is achieved through careful resistor placement and mechanical configuration. The small die results In a significant cost saving when compared to larger sensor die. This sensor is intended for high volume applications where cost is a critical factor, such as consumer tire pressure gauges or disposable pressure monitors. The SM5106 is available as an absolute pressure sensor in full-scale ranges of 15 PSI, 30 PSI, 60 PSI, and 150 PSI. It is designed to be mounted on ceramic or PC board substrates by OEM manufacturers. Die are probed, inked, diced, and visually inspected and shipped on tape in rings. Custom pressure ranges available in highvolume applications.
FEATURES
* * * * * Available in 15 PSI, 30 PSI, 60 PSI, and 150 PSI ranges Very Low Cost Small size (1.56 mm square) Constant Current or Constant Voltage Drive High Millivolt Output
APPLICATIONS
* * * * * * Automotive Tire Engine Control Blood Pressure Pneumatic Gages Hand-held Meters Home Appliances
Rev 1.2 8_02
2001-2002 Silicon Microstructures, Inc. 1701 McCarthy Blvd. Milpitas, CA 95035 USA Tel: 408-577-0100 Fax: 408-577-0123 Sales@Si-Micro.Com WWW.Si-Micro.Com
SM5106
CHARACTERISTICS FOR SM5106 - SPECIFICATIONS All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min. Excitation Voltage Excitation Current Span (FS Range) 15 PSI 30 PSI 60 PSI 150 PSI Offset TC Span TC Offset TC Resistance Linearity Bridge Impedance Proof Pressure Burst Pressure Operating Temperature Storage Temperature 0 0 75 85 85 100 -35 -24 -7 +24 -0.45 4 3X 5X -40 -55
Typ. 5.0 1.5 100 110 125 145 8 -19 -1 +27.5 -0.15 5
Max. 15 2.5 125 130 150 195 35 -15.5 +7 +33 +0.45 6
Units V mA mV mV mV mV mV %FS/100C %FS/100C %/100C %FS k Rated FS Rated FS C C
Notes 1 1 2
3 3 3 4
+125 +150
Notes: 1. Bridge may be driven with positive or negative excitation; positive output for positive pressure applied to circuit side of die when bridge is driven with positive voltage. 2. Measured at 5V constant voltage excitation. 3. Measured from 0 to 70 C 0.30 mm 4. Defined as best straight line. +Vexc
Vsub
1.56 mm
Sig+
0.13 mm
Sig-
ORDERING INFORMATION:
Model Number
SM5106 - 015 - A
A: Absolute (only)
Pressure range Pressure Type
Pressure Ranges PSI 5106 15 015 30 030 60 060 150 150
0.40 mm 0.20 mm 0.05 mm 0.20 mm
-Vexc
1.56 mm
SM5106 (1.56 mm square as sawn)
Covered under USA Mask-Copyright
See separate Application Notes for typical range of variation in Saw dimensions.
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this publication has been checked, no responsibility, however, is assumed for inaccuracies. Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Rev 1.2 8_02
2001-2002 Silicon Microstructures, Inc. 1701 McCarthy Blvd. Milpitas, CA 95035 USA Tel: 408-577-0100 Fax: 408-577-0123 Sales@Si-Micro.Com WWW.Si-Micro.Com

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